Speaker
Stepan Eliseev
Description
See the full Abstract at http://ocs.ciemat.es/EPS2018ABS/pdf/O2.303.pdf
Glow Discharges with Gridded Electrodes: Models and Applications
S. I. Eliseev1, A. I. Saifutdinov1, S. S. Sysoev1, A. A. Kudryavtsev2
1
Saint Petersburg State University, St. Petersburg. Russia
2
Harbin Institute of Technology, Harbin, China
Low pressure glow discharges with gridded electrodes can be efficiently used to create
electron beams and sustain low-temperature plasma in large volumes. Such electrode
configurations are now used as plasma sources in experiments on electromagnetic wave
propagation in plasma. Besides, the properties of such plasma – weak electric field and low
electron temperature – are similar to those of the negative glow region of DC discharge in planar
or hollow configurations [1]. Plasma in this region is characterized by nonlocality of electron
energy distribution function (EEDF), and several electron groups which behave almost
independently can be distinguished. Greater dimensions of plasma created in configurations
with gridded electrodes allows obtaining better spatial resolution of probe measurements, which
opens doors for experimental investigation of electron kinetics, implementation of selective
control of plasma parameters and gas analysis.
Discharges with gridded electrodes require low pL values (product of pressure and
intereletrode gap), which corresponds to the left branch of Paschen curve. In this case a cathode
sheath is formed between the electrodes which accelerates electrons up to high energies and
injects them through the electrode grid into the space where they lose acquired energy on
ionization of neutral atoms [2]. This way plasma is created outside the interelectrode gap, and
its size depends on the range of beam electrons. The ionization rate induced by these beam
electrons depends on parameters of the sheath and can be expressed analytically. In this work
such formulation of ionization source was used to create clear models of such discharges, both
for purposes of carrying out efficient numerical simulations and writing simple expressions for
dependence of discharge parameters from external conditions, i.e. scaling laws. Comparison of
results obtained using both methods with each other and with data obtained from probe
measurements is presented. Self-sustainment of discharges in various electrode configurations,
especially the role of ions coming into the cathode sheath from plasma, is investigated.
The work was supported by Russian Science Foundation (RSCF, grant № 17-79-20032)
and Saint Petersburg State University (grant № 11.37.212.2016).
REFERENCES
[1] Yuan, C., Kudryavtsev, A. A., Saifutdinov, A. I., Sysoev, S. S., Tian, R., Yao, J., & Zhou, Z. IEEE
Transactions on Plasma Science, 45(12), 3110-3113, 2017.
[2] Yuan, C., Yao, J., Eliseev, S. I., Bogdanov, E. A., Kudryavtsev, A. A., & Zhou, Z., Journal of Applied
Physics, 122(14), 143304,2017.
