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EPS 2018 Programme

Jul 2 – 6, 2018
Žofín Palace
Europe/Prague timezone

Session

LTDP

Jul 3, 2018, 10:40 AM
Žofín Palace

Žofín Palace

Slovanský ostrov 226, 110 00 Praha 1

Conveners

LTDP

  • H. Thomas

Description

Chair: H. Thomas

Presentation materials

There are no materials yet.

  1. 5339. I2.305 Influence of plasma pulsing on active species kinetics in low pressure radiofrequency ICP plasmas
    Agnes Granier
    7/3/18, 10:40 AM
    Talk
    See the full Abstract at http://ocs.ciemat.es/EPS2018ABS/pdf/I2.305.pdf Influence of plasma pulsing on active species kinetics in low pressure radiofrequency ICP plasmas A. Granier1, A. Bousquet2, M. Mitronika1, L. Stafford3, S. Bulou4, M. Richard-Plouet1, A. Goullet1 1 ...
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  2. 5340. I2.306 Extraction of positive and negative ion beams from large area plasma sources
    Svetlana Radovanov
    7/3/18, 11:10 AM
    Talk
    See the full Abstract at http://ocs.ciemat.es/EPS2018ABS/pdf/I2.306.pdf Extraction of Positive and Negative Ion Beams from Large Area Plasma Sources S. Radovanov1, A. Samolov1 1 Applied Materials, SPG, Gloucester, Massachusetts, USA Energetic ion beams, extracted from large area...
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  3. 5408. O2.301 Design and performance of solid-state microwave plasma sources for lab and industrial applications
    Kostiantyn Achkasov
    7/3/18, 11:40 AM
    Talk
    See the full Abstract at http://ocs.ciemat.es/EPS2018ABS/pdf/O2.301.pdf Design and performance of solid-state microwave plasma sources for lab and industrial applications K. Achkasov1, L. Latrasse1, J. Lo2 and P. Guillot2 1 SAIREM SAS, 12 Porte du Grand Lyon, 01700, Neyron, France 2 ...
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  4. 5407. O2.302 Current Status of Etching Process Diagnostics and Simulations Based on Atomic and Molecular Data
    Jung-Sik Yoon
    7/3/18, 11:55 AM
    Talk
    See the full Abstract at http://ocs.ciemat.es/EPS2018ABS/pdf/O2.302.pdf Current Status of Etching Process Diagnostics and Simulations based on Atomic and Molecular Data Jung-Sik Yoon1, Mi-Young Song1, Deuk-Chul Kwon1 1 Plasma Technology Research Center, National Fusion Research Institute, Gunsan, Korea The semiconductor industry’s...
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  5. 5414. O2.303 Glow Discharges with Gridded Electrodes: Models and Applications
    Stepan Eliseev
    7/3/18, 12:10 PM
    Talk
    See the full Abstract at http://ocs.ciemat.es/EPS2018ABS/pdf/O2.303.pdf Glow Discharges with Gridded Electrodes: Models and Applications S. I. Eliseev1, A. I. Saifutdinov1, S. S. Sysoev1, A. A. Kudryavtsev2 1 Saint Petersburg State University, St. Petersburg. Russia 2 ...
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  6. 5409. O2.304 Features of forming atmospheric pressure plasma jet in helium and argon flows
    Olga Stepanova
    7/3/18, 12:25 PM
    Talk
    See the full Abstract at http://ocs.ciemat.es/EPS2018ABS/pdf/O2.304.pdf Features of forming atmospheric pressure plasma jet in helium and argon flows O. Stepanova1 , M. Pinchuk2 , A. Astafiev2 , Z. Chen3 1 Saint Petersburg State University, St. Petersburg, Russia 2 ...
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