EPS 2018 Programme

Session

LTDP

Jul 3, 2018, 10:40 AM

Žofín Palace

Conveners

LTDP

• H. Thomas

Description

Chair: H. Thomas

5339. I2.305 Influence of plasma pulsing on active species kinetics in low pressure radiofrequency ICP plasmas

Agnes Granier

7/3/18, 10:40 AM

Talk

See the full Abstract at http://ocs.ciemat.es/EPS2018ABS/pdf/I2.305.pdf Influence of plasma pulsing on active species kinetics in low pressure radiofrequency ICP plasmas A. Granier1, A. Bousquet2, M. Mitronika1, L. Stafford3, S. Bulou4, M. Richard-Plouet1, A. Goullet1 1 ...

5340. I2.306 Extraction of positive and negative ion beams from large area plasma sources

Svetlana Radovanov

7/3/18, 11:10 AM

Talk

See the full Abstract at http://ocs.ciemat.es/EPS2018ABS/pdf/I2.306.pdf Extraction of Positive and Negative Ion Beams from Large Area Plasma Sources S. Radovanov1, A. Samolov1 1 Applied Materials, SPG, Gloucester, Massachusetts, USA Energetic ion beams, extracted from large area...

5408. O2.301 Design and performance of solid-state microwave plasma sources for lab and industrial applications

Kostiantyn Achkasov

7/3/18, 11:40 AM

Talk

See the full Abstract at http://ocs.ciemat.es/EPS2018ABS/pdf/O2.301.pdf Design and performance of solid-state microwave plasma sources for lab and industrial applications K. Achkasov1, L. Latrasse1, J. Lo2 and P. Guillot2 1 SAIREM SAS, 12 Porte du Grand Lyon, 01700, Neyron, France 2 ...

5407. O2.302 Current Status of Etching Process Diagnostics and Simulations Based on Atomic and Molecular Data

Jung-Sik Yoon

7/3/18, 11:55 AM

Talk

See the full Abstract at http://ocs.ciemat.es/EPS2018ABS/pdf/O2.302.pdf Current Status of Etching Process Diagnostics and Simulations based on Atomic and Molecular Data Jung-Sik Yoon1, Mi-Young Song1, Deuk-Chul Kwon1 1 Plasma Technology Research Center, National Fusion Research Institute, Gunsan, Korea The semiconductor industry’s...

5414. O2.303 Glow Discharges with Gridded Electrodes: Models and Applications

Stepan Eliseev

7/3/18, 12:10 PM

Talk

See the full Abstract at http://ocs.ciemat.es/EPS2018ABS/pdf/O2.303.pdf Glow Discharges with Gridded Electrodes: Models and Applications S. I. Eliseev1, A. I. Saifutdinov1, S. S. Sysoev1, A. A. Kudryavtsev2 1 Saint Petersburg State University, St. Petersburg. Russia 2 ...

5409. O2.304 Features of forming atmospheric pressure plasma jet in helium and argon flows

Olga Stepanova

7/3/18, 12:25 PM

Talk

See the full Abstract at http://ocs.ciemat.es/EPS2018ABS/pdf/O2.304.pdf Features of forming atmospheric pressure plasma jet in helium and argon flows O. Stepanova1 , M. Pinchuk2 , A. Astafiev2 , Z. Chen3 1 Saint Petersburg State University, St. Petersburg, Russia 2 ...