EPS 2018 Programme

Session

LTDP

Jul 2, 2018, 4:30 PM

Žofín Palace

Conveners

LTDP

• U. Cvelbar

Description

Chair: U. Cvelbar

5321. I1.301 Challenges for the development of plasma-based atomic layer processing - numerical and experimental analyses of plasma-exposed surface reactions at the atomic level

Satoshi Hamaguchi

7/2/18, 4:30 PM

Talk

See the full Abstract at http://ocs.ciemat.es/EPS2018ABS/pdf/I1.301.pdf Challenges for the development of plasma-based atomic layer processing − numerical and experimental analyses of plasma-exposed surface reactions at the atomic level Satoshi Hamaguchi and Kazuhiro Karahashi Center for Atomic and Molecular Technologies, Osaka...

5322. I1.302 Plasma-surface interaction studies: Development and application of advanced laser-based diagnostics

Jean-Pierre Hubertus van Helden

7/2/18, 5:00 PM

Talk

See the full Abstract at http://ocs.ciemat.es/EPS2018ABS/pdf/I1.302.pdf Plasma-surface interaction studies: Development and application of advanced laser-based diagnostics N. Lang1, A. D. F. Puth1, S.-J. Klose1, G. Kowzan2, S. Hamann1, J. Röpcke1, P. Maslowski2, J. H. van Helden1 1 Leibniz Institute for Plasma Science and...

5323. I1.303 Sensitive measurement of sheath electric field by Stark spectroscopy using the Balmer-alpha line of atomic hydrogen

Koichi Sasaki

7/2/18, 5:30 PM

Talk

See the full Abstract at http://ocs.ciemat.es/EPS2018ABS/pdf/I1.303.pdf Sensitive measurement of sheath electric field by Stark spectroscopy using the Balmer-alpha line of atomic hydrogen K. Sasaki and S. Nishiyama Division of Quantum Science and Engineering, Hokkaido University, Sapporo, Japan The measurement of sheath...

5324. I1.304 Application of the PI-VM (Plasma Information based Virtual Metrology) for management of the plasma processes in OLED display manufacturing

Seolhye Park

7/2/18, 6:00 PM

Talk

See the full Abstract at http://ocs.ciemat.es/EPS2018ABS/pdf/I1.304.pdf Application of the PI-VM (Plasma Information based Virtual Metrology) for management of the plasma processes in OLED display manufacturing S. Park1,2, T. Cho1, J. Lee1, Y. Jang1, J.-J. Hong1, W.-H. Jang1, and G.-H. Kim2 1 Samsung Display Co., Ltd, Chungcheongnam-do, Korea ...