Speaker
Hynek Biederman
Description
See the full Abstract at http://ocs.ciemat.es/EPS2018ABS/pdf/I2.308.pdf
Plasma deposition of nanocomposite films with polymeric matrix
A. Choukourov1, O. Kylian1, A. Shelemin1, P. Solar1, H. Biederman1
1
Department of Macromolecular Physics, Faculty of Mathematics and Physics, Charles University,
Prague, Czech Republic
In the past decades most of the attention has been paid to the nanocomposite metal/plasma
polymer films. These have been studied since 70ties of the last century and have usually been
prepared by simultaneous plasma polymerization and RF or later even DC sputtering of a metal
target. In recent years gas aggregation cluster sources (GAS) employing a planar magnetron
sputtering at high pressure ( ~ 100 Pa) have been used. Nanoparticles of various metals such as
Ag, Cu, Al, Ti and etc. in the form of beams were produced by these sources. Ag and Al NPs
were embedded into C:H plasma polymer. Cu and Ag NPs were incorporated into
a-C:H(amorphous hydrogenated carbon) matrix. This material originates on RF driven DC
negatively biased substrate at elevated values (usually more than -200 V). Below this value the
matrix material is a hard plasma polymer (C:H). Soft plasma etching in O2 enhanced Ag
exposition and therefore short term release of Ag in antibacterial applications.
RF magnetron sputtering of Nylon 6,6 and/or PTFE targets in the GAS at pressures 40 – 100 Pa
of Ar was used to prepare nanoparticles of corresponding plasma polymer. In addition, a planar
magnetron with the graphite target in the GAS operated in the vapours of n-hexane or HMDSO
mixed with Ar allowed to prepared C:H and SixOyCz plasma polymer nanoparticles.
Preparation and properties of nanocomposite and nanoparticle - nanostructured films (e.g. Ag,
Ti or plasma polymer nanoparticles overcoated by plasma polymer or Ti) are described as well
as GLAD (glancing angle deposition) over seed nanoparticles.
Lately, core@shell nanoparticles composed of Ag core or even Ag multicore embedded in a
plasma polymer shell are presented. These are prepared in a GAS using RF or even DC
magnetron sputtering in a working gas mixture Ar + HMDSO (or n-hexane). Basic physical
properties of nanocomposites metal/plasma polymer films deposited from the above
heterogeneous NPs are described. In conclusion further development and potential applications
are discussed.
Acknowledgement
This work was supported by the grant GACR 17-22016S from the Czech Science Foundation.