Speaker
A. Y. Grabovskiy
Description
See the full Abstract at http://ocs.ciemat.es/EPS2018ABS/pdf/P1.3001.pdf
Determination of Anisotropic Ion Velocity Distribution Function in
Intrinsic Gas Plasma. Probe Method
A.S. Mustafaev¹, A.Y. Grabovskiy¹, V.S. Soukhomlinov²
¹St. Petersburg Mining University, St. Petersburg, Russia
²St. Petersburg State University, St. Petersburg, Russia
The ion velocity distribution function (IVDF) is of interest in cases associated with the
study of plasmachemical reactions occurring with the participation of ions, the determination
of ion mobility in the plasma object, processes of heating of the neutral plasma component,
etc. Among technical applications, we remark modern plasma nanotechnologies, fine ion
purification of the surfaces, and the technology of creating reliefs on the surface owing to
selective etching during bombardment by ion fluxes.
This work is devoted to the experimental and theoretical determination of the ion
velocity distribution function in intrinsic gas for a glow discharge in a constant field with
allowance for the appearance of slow ions with atomic temperature as a result of charge
exchange, which was considered the
dominating process. It was assumed that
the ion velocity before the collision
considerably exceeds the velocity of
atoms.
For the first time, the ion
distribution functions over energy and
direction of motion for He+ in He (see
Figure) and Ar+ in Ar have been
measured by the method of the plane one-
Figure. Comparison of IDF He+ in He in the strong field
approximation [1] with experimental data: Ta=600K, sided probe [2]. Here IVDF was
E/P0=20 V/cm∙Torr, P=0,2 Torr
determined in the glow discharge of
intrinsic gas in a constant electric field of an arbitrary value. The obtained results make it
possible to conclude that, in independent gas discharge plasma, even at moderate fields, the
ion distribution function can have noticeable anisotropy and can strongly differ from Maxwell
distribution.
References
[1] A. Mustafaev, V. Sukhomlinov and M. Ainov. 2015. Tech. Phys. Vol. 60 P. 1778.
[2] A.S. Mustafaev, A.A. Strakhova. Journal of Mining Institute. 2017. Vol 226. P. 462.
